It is an extremely pure material that is mainly used as components used for thermal processes in semiconductor manufacturing. In addition to conventional 300 mm-and-under horizontal furnaces and vertical furnaces, this product enables the design and manufacturing of 450 mm components to meet increasing wafer sizes. AGC is pursuing technological development to further increase purification and boost the precision of processing technologies to catch up with the trends in the miniaturization processes, which have advanced to the nano level, in the pre-processing of semiconductors.
High purity & High thermal conductivity
High precisions fabrication
High acid resistance (v.s. quartz)
Semiconductor Manufacturing Process
Solar Cell Manufacturing process
Susceptor, Tray and Heater for MOCVD , Epi Process and RTP