This product is applied to the touch-panels and cover-glass for mobile electronic devices, such as smart-phones, tablet PCs and notebook PCs. AGC’s 0.23mm thin soda-lime glass has already been adopted on the market, and development for thinner glass is also in progress.
A Production method and Features of AQ series
AGC’s Synthetic Fused Silica AQ series is manufactured by the VAD method. The VAD method can reduce Si-OH content, providing customers with synthetic fused silica with the following features.
Product Key Features:
- High transmittance for deep ultraviolet rays with frequencies < 200 nm ranging from the i-ray to KrF, ArF, or Xe excimer lamps, and even for near infrared rays *1
- Excellent Compaction/Rarefaction and Polarization Induced Birefringence(PIB) characteristics*2
- Resistant to heat processing around 1000°C*3
- Excellent durability against high-energy laser beams
- Thermal expansion as low as 1/10 that of conventional glass
- High uniformity
- Very high purity, very low metal impurity content
- Low OH group content
- Outstanding chemical resistance
- Low dielectric loss
- *DUV-absorption due to electron transition and IR-absorption caused by Si-OH vibration are both reduced.
- *No rarefaction can be seen in silica glass having low SiOH content such as AGC silica glass. In addition, some ArF excimer laser exposure tests indicate low SiOH containing silica glass has good compaction and PIB characteristics. AGC has installed excimer laser exposure test lines to estimate the long-term durability of silica glass. AGC has been diligently researching and developing based on a wealth of exposure results for a long time.
- The decrease in SiOH content makes the Si-O-Si binding network rigid and viscosity high, and consequently makes the heat resistance of silica glass high.
- Lens material for IC
- LCD steppers/scanners
- Photo mask substrate
- Other optical materials
- Glass wafer